Shallow trench isolation - Wikipedia
High aspect ratio via etching conditions for deep trench of silicon - ScienceDirect
Trench vert peps – Ralentis Simone
SiC Trench Plasma Etching for SiC Power Device Fabrication - Samco Inc.
trench etching
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting - ScienceDirect
Plasma Etch Processes for SiC and GaN-on-Si Power Devices | SPTS
BEOL (Back End of Line: interconnect process, the second half of wafer processing) 10. Metal-1 | USJC：United Semiconductor Japan Co., Ltd.
Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers | ACS Omega
Sidewall damage caused in deep silicon trench etch. | Download Scientific Diagram
In situ Metrology for Etch Endpoint Detection - Coventor
Trench Etch Profile on Si Wafer
Deep Silicon Etching (Trench/Via) using Bosch Process - SAMCO Inc.
SPM Fluorine Etching
SiC Trench Plasma Etching for SiC Power Device Fabrication - Samco Inc.
Etch Overview
Silicon trenches etched in an ICP chamber with pure Cl 2 chemistry.... | Download Scientific Diagram
GaN Deep Trench Etch｜Samco Inc.
SiC trench etch for MOSFET application - ppt download
![PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/531014d7cb7b40f1687f1fddc4f2d56eedc3eb79/2-Figure1-1.png "PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar")
PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar
30µm isolation trench etch | Download Scientific Diagram
Trench Etch Profile on MESA
Wet etching of deep trenches on silicon with three-dimensional (3D) controllability | Semantic Scholar
