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Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices - ScienceDirect
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Albert Theuwissen's keynote at 2020 IEEE Sensors: "Deep-Trench Isolation is Here to Stay!" - YouTube
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Figure 4 from A deep trench isolation integrated in a 0.13um BiCD process technology for analog power ICs | Semantic Scholar
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Pixel device on deep trench isolation (DTI) structure for image sensor Patent Grant Takahashi , et al. September 29, 2 [Taiwan Semiconductor Manufacturing Co., Ltd.]
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Fabrication process flow. (a) Si deep trench etching. (b) Deposited SiO... | Download Scientific Diagram
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Next generation of Deep Trench Isolation for Smart Power technologies with 120 V high-voltage devices - ScienceDirect
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